TU Darmstadt / ULB / TUbiblio

Surface Energy Controlled Preferential Orientation of Thin Films

Körber, Christoph and Suffner, Jens and Klein, Andreas (2010):
Surface Energy Controlled Preferential Orientation of Thin Films.
In: Journal of Physics D: Applied Physics, IOP Publishing, pp. 055301, 43, (5), ISSN 0022-3727,
[Article]

Abstract

The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold

Item Type: Article
Erschienen: 2010
Creators: Körber, Christoph and Suffner, Jens and Klein, Andreas
Title: Surface Energy Controlled Preferential Orientation of Thin Films
Language: English
Abstract:

The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold

Journal or Publication Title: Journal of Physics D: Applied Physics
Volume: 43
Number: 5
Publisher: IOP Publishing
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 29 Oct 2011 08:09
Identification Number: doi:10.1088/0022-3727/43/5/055301
Funders: This work has been supported by the German Science Foundation (contract No KL1225/4).
Export:
Suche nach Titel in: TUfind oder in Google

Optionen (nur für Redakteure)

View Item View Item