Körber, Christoph and Suffner, Jens and Klein, Andreas (2010):
Surface Energy Controlled Preferential Orientation of Thin Films.
In: Journal of Physics D: Applied Physics, IOP Publishing, pp. 055301, 43, (5), ISSN 0022-3727,
[Article]
Abstract
The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold
| Item Type: | Article |
|---|---|
| Erschienen: | 2010 |
| Creators: | Körber, Christoph and Suffner, Jens and Klein, Andreas |
| Title: | Surface Energy Controlled Preferential Orientation of Thin Films |
| Language: | English |
| Abstract: | The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold |
| Journal or Publication Title: | Journal of Physics D: Applied Physics |
| Volume: | 43 |
| Number: | 5 |
| Publisher: | IOP Publishing |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials 11 Department of Materials and Earth Sciences > Material Science > Surface Science 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 29 Oct 2011 08:09 |
| Identification Number: | doi:10.1088/0022-3727/43/5/055301 |
| Funders: | This work has been supported by the German Science Foundation (contract No KL1225/4). |
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