Seils, Sascha ; Baraki, Raschid ; Jamin, Christine ; Guillon, Olivier (2011)
Free-Standing Patterned Ceramic Structures Obtained by Soft Micromolding.
In: Advanced Engineering Materials, 13 (6)
doi: 10.1002/adem.201100013
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Patterned ceramic films with constant thickness can be processed by a soft lithographic method. By using micromolding in capillaries, the slurry is forced to flow through channels created in an elastomer stamp. After drying, layers deposited on an amorphous carbon substrate were sintered under inert atmosphere. Free-standing ceramic structures with high aspect ratio were obtained with lateral resolution better than 1mm. Dimensional changes were monitored in comparison to films deposited on stiff sapphire substrate. This technique enables to process a large variety of structures, from optical or electronic components to sieve and MEMS applications.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2011 |
| Autor(en): | Seils, Sascha ; Baraki, Raschid ; Jamin, Christine ; Guillon, Olivier |
| Art des Eintrags: | Bibliographie |
| Titel: | Free-Standing Patterned Ceramic Structures Obtained by Soft Micromolding |
| Sprache: | Englisch |
| Publikationsjahr: | 11 Juli 2011 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Advanced Engineering Materials |
| Jahrgang/Volume einer Zeitschrift: | 13 |
| (Heft-)Nummer: | 6 |
| DOI: | 10.1002/adem.201100013 |
| Kurzbeschreibung (Abstract): | Patterned ceramic films with constant thickness can be processed by a soft lithographic method. By using micromolding in capillaries, the slurry is forced to flow through channels created in an elastomer stamp. After drying, layers deposited on an amorphous carbon substrate were sintered under inert atmosphere. Free-standing ceramic structures with high aspect ratio were obtained with lateral resolution better than 1mm. Dimensional changes were monitored in comparison to films deposited on stiff sapphire substrate. This technique enables to process a large variety of structures, from optical or electronic components to sieve and MEMS applications. |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Nichtmetallisch-Anorganische Werkstoffe 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 11 Jul 2011 08:07 |
| Letzte Änderung: | 05 Mär 2013 09:50 |
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