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An acceleration sensor in CMOS-compatible technology for integration in complex systems

Lang, Markus (1996):
An acceleration sensor in CMOS-compatible technology for integration in complex systems.
In: Micromechanics Europe MME '96 <1996, Barcelona>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Lang, Markus
Title: An acceleration sensor in CMOS-compatible technology for integration in complex systems
Language: English
Series Name: Micromechanics Europe MME '96 <1996, Barcelona>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:00
License: [undefiniert]
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