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Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation

Ensinger, Wolfgang :
Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation.
[Online-Edition: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...]
In: Surface and Coatings Technology, 203 (17-18) pp. 2721-2726.
[Artikel], (2009)

Offizielle URL: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...

Kurzbeschreibung (Abstract)

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests.

Typ des Eintrags: Artikel
Erschienen: 2009
Autor(en): Ensinger, Wolfgang
Titel: Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation
Sprache: Englisch
Kurzbeschreibung (Abstract):

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Surface and Coatings Technology
Band: 203
(Heft-)Nummer: 17-18
Verlag: Elsevier Science Publishing Company
Freie Schlagworte: Aluminium, Diamond-like carbon, Plasma immersion ion implantations, Steel, Titanium, Wear
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Materialanalytik
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 15 Jul 2009 12:49
Offizielle URL: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...
Sponsoren: The author's work on HC-PIII has been financially supported by Deutsche Forschungsgemeinschaft under project number EN 207/19-1.
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