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Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation

Ensinger, Wolfgang :
Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation.
[Online-Edition: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...]
In: Surface and Coatings Technology, 203 (17-18) pp. 2721-2726.
[Article] , (2009)

Official URL: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...

Abstract

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests.

Item Type: Article
Erschienen: 2009
Creators: Ensinger, Wolfgang
Title: Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation
Language: English
Abstract:

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests.

Journal or Publication Title: Surface and Coatings Technology
Volume: 203
Number: 17-18
Publisher: Elsevier Science Publishing Company
Uncontrolled Keywords: Aluminium, Diamond-like carbon, Plasma immersion ion implantations, Steel, Titanium, Wear
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 15 Jul 2009 12:49
Official URL: http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M...
Funders: The author's work on HC-PIII has been financially supported by Deutsche Forschungsgemeinschaft under project number EN 207/19-1.
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