Ensinger, Wolfgang (2009)
Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation.
In: Surface and Coatings Technology, 203 (17-18)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2009 |
| Autor(en): | Ensinger, Wolfgang |
| Art des Eintrags: | Bibliographie |
| Titel: | Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation |
| Sprache: | Englisch |
| Publikationsjahr: | 15 Juni 2009 |
| Verlag: | Elsevier Science Publishing Company |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Surface and Coatings Technology |
| Jahrgang/Volume einer Zeitschrift: | 203 |
| (Heft-)Nummer: | 17-18 |
| URL / URN: | http://www.sciencedirect.com/science/article/B6TVV-4VS4000-M... |
| Kurzbeschreibung (Abstract): | Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PIII DLC films are discussed. The process parameters of HC-PIII, including bias voltage, plasma-forming gas, and experimental setup, are correlated with the properties of the DLC film, such as bonding characteristics, hardness, stress state, and the resulting tribological performance, as shown in friction and wear tests. |
| Freie Schlagworte: | Aluminium, Diamond-like carbon, Plasma immersion ion implantations, Steel, Titanium, Wear |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 15 Jul 2009 12:49 |
| Letzte Änderung: | 05 Mär 2013 09:20 |
| PPN: | |
| Sponsoren: | The author's work on HC-PIII has been financially supported by Deutsche Forschungsgemeinschaft under project number EN 207/19-1. |
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