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Chemical character of BCxNy layers grown by CVD with trimethylamine borane

Baake, O. and Hoffmann, P. S. and Klein, Andreas and Pollakowski, B. and Beckhoff, B. and Ensinger, W. and Kosinova, M. and Fainer, N. and Sulyaeva, V. S. and Trunova, V. (2009):
Chemical character of BCxNy layers grown by CVD with trimethylamine borane.
In: X-Ray Spectrometry, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, pp. 68-73, 38, (1), [Online-Edition: http://dx.doi.org/10.1002/xrs.1117],
[Article]

Abstract

Layers of BCxNy were produced in a chemical vapour deposition (CVD) process using trimethylamine borane with He, N2, and NH3, respectively, as precursor. These layers deposited on Si (100) wafers were characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine structure spectroscopy (TXRF-NEXAFS). As a result, the composition of the material produced without NH3 is a B-C bonds containing compound with an atomic relation 1:1. Adding NH3 with a partial pressure of up to about 1.3 Pa the product could be identified as B2C2N. Increasing the partial pressure of NH3 to 1.7 and 2.1 Pa the product was enriched in nitrogen yielding a compound characterized as h-BCN. In all cases an impurity of oxygen was observed.

Item Type: Article
Erschienen: 2009
Creators: Baake, O. and Hoffmann, P. S. and Klein, Andreas and Pollakowski, B. and Beckhoff, B. and Ensinger, W. and Kosinova, M. and Fainer, N. and Sulyaeva, V. S. and Trunova, V.
Title: Chemical character of BCxNy layers grown by CVD with trimethylamine borane
Language: English
Abstract:

Layers of BCxNy were produced in a chemical vapour deposition (CVD) process using trimethylamine borane with He, N2, and NH3, respectively, as precursor. These layers deposited on Si (100) wafers were characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine structure spectroscopy (TXRF-NEXAFS). As a result, the composition of the material produced without NH3 is a B-C bonds containing compound with an atomic relation 1:1. Adding NH3 with a partial pressure of up to about 1.3 Pa the product could be identified as B2C2N. Increasing the partial pressure of NH3 to 1.7 and 2.1 Pa the product was enriched in nitrogen yielding a compound characterized as h-BCN. In all cases an impurity of oxygen was observed.

Journal or Publication Title: X-Ray Spectrometry
Volume: 38
Number: 1
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 15 Jul 2009 12:43
Official URL: http://dx.doi.org/10.1002/xrs.1117
Identification Number: doi:10.1002/xrs.1117
Funders: Funded by DeutscheForschungsgemeinschaft
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