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Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation

Ensinger, Wolfgang :
Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation.
In: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei. Research Signpost, Trivandrum , S. 135-178. ISBN 978-81-308-0257-2
[Buchkapitel] , (2008)

Kurzbeschreibung (Abstract)

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Typ des Eintrags: Buchkapitel
Erschienen: 2008
Autor(en): Ensinger, Wolfgang
Titel: Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation
Sprache: Englisch
Kurzbeschreibung (Abstract):

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Buchtitel: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei
Ort: Trivandrum
Verlag: Research Signpost
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 06 Jul 2009 13:59
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