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Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation

Ensinger, Wolfgang (2008)
Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation.
In: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei
Buchkapitel, Bibliographie

Kurzbeschreibung (Abstract)

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Typ des Eintrags: Buchkapitel
Erschienen: 2008
Autor(en): Ensinger, Wolfgang
Art des Eintrags: Bibliographie
Titel: Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation
Sprache: Englisch
Publikationsjahr: 2 Juli 2008
Ort: Trivandrum
Verlag: Research Signpost
Buchtitel: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei
Kurzbeschreibung (Abstract):

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 06 Jul 2009 13:59
Letzte Änderung: 05 Mär 2013 09:20
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