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Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation

Ensinger, Wolfgang :
Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation.
In: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei. Research Signpost, Trivandrum , pp. 135-178. ISBN 978-81-308-0257-2
[Book Section] , (2008)

Abstract

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Item Type: Book Section
Erschienen: 2008
Creators: Ensinger, Wolfgang
Title: Formation of carbides and diamond-like carbon films by hydrocarbon plasma immersion ion implantation
Language: English
Abstract:

In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D process particularly for diamondlike carbon (DLC) depositions. He discusses the work in carbon implantation and deposition of Si, B and many metals including Al and stainless steels. The performance of DLC coatings is highlighted in particular for corrosion protection. He also reviews the work in deposition of tubular structures.

Title of Book: Plasma Surface Engineering Research and its Practical Applications. Ed.: Ronghua Wei
Place of Publication: Trivandrum
Publisher: Research Signpost
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 06 Jul 2009 13:59
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