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Nondestructive characterization of nanoscale layered samples

Baake, Olaf and Hoffmann, Peter and Flege, Stefan and Ortner, Hugo and Gottschalk, Sebastian and Berky, Wolfram and Balogh, Adam and Ensinger, Wolfgang and Beckhoff, Burkhard and Kolbe, Michael and Gerlach, Martin and Pollakowski, Beatrix and Weser, Jan and Ulm, Gerhard and Haschke, Michael and Blokhina, Elena and Peter, Markus and Porta, Dominique and Heck, Martin (2009):
Nondestructive characterization of nanoscale layered samples.
393, In: Analytical and Bioanalytical Chemistry, (2), Springer-Verlag, pp. 623-634, ISSN 1618-2642, [Online-Edition: http://dx.doi.org/10.1007/s00216-008-2465-2],
[Article]

Abstract

Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by meansof SRXRF, μ-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e.g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, μ-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters.

Item Type: Article
Erschienen: 2009
Creators: Baake, Olaf and Hoffmann, Peter and Flege, Stefan and Ortner, Hugo and Gottschalk, Sebastian and Berky, Wolfram and Balogh, Adam and Ensinger, Wolfgang and Beckhoff, Burkhard and Kolbe, Michael and Gerlach, Martin and Pollakowski, Beatrix and Weser, Jan and Ulm, Gerhard and Haschke, Michael and Blokhina, Elena and Peter, Markus and Porta, Dominique and Heck, Martin
Title: Nondestructive characterization of nanoscale layered samples
Language: English
Abstract:

Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by meansof SRXRF, μ-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e.g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, μ-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters.

Journal or Publication Title: Analytical and Bioanalytical Chemistry
Volume: 393
Number: 2
Publisher: Springer-Verlag
Uncontrolled Keywords: Layers; Elements; Oxides; Purity; Sequence; Roughness; Density; Homogeneity; Thickness; XRR; RBS; WDXRF; SRXRF; μ-XRF
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 06 Jul 2009 13:50
Official URL: http://dx.doi.org/10.1007/s00216-008-2465-2
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