Baake, Olaf ; Hoffmann, Peter ; Flege, Stefan ; Ortner, Hugo ; Gottschalk, Sebastian ; Berky, Wolfram ; Balogh, Adam ; Ensinger, Wolfgang ; Beckhoff, Burkhard ; Kolbe, Michael ; Gerlach, Martin ; Pollakowski, Beatrix ; Weser, Jan ; Ulm, Gerhard ; Haschke, Michael ; Blokhina, Elena ; Peter, Markus ; Porta, Dominique ; Heck, Martin (2009)
Nondestructive characterization of nanoscale layered samples.
In: Analytical and Bioanalytical Chemistry, 393 (2)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by meansof SRXRF, μ-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e.g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, μ-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2009 |
| Autor(en): | Baake, Olaf ; Hoffmann, Peter ; Flege, Stefan ; Ortner, Hugo ; Gottschalk, Sebastian ; Berky, Wolfram ; Balogh, Adam ; Ensinger, Wolfgang ; Beckhoff, Burkhard ; Kolbe, Michael ; Gerlach, Martin ; Pollakowski, Beatrix ; Weser, Jan ; Ulm, Gerhard ; Haschke, Michael ; Blokhina, Elena ; Peter, Markus ; Porta, Dominique ; Heck, Martin |
| Art des Eintrags: | Bibliographie |
| Titel: | Nondestructive characterization of nanoscale layered samples |
| Sprache: | Englisch |
| Publikationsjahr: | 1 Januar 2009 |
| Verlag: | Springer-Verlag |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Analytical and Bioanalytical Chemistry |
| Jahrgang/Volume einer Zeitschrift: | 393 |
| (Heft-)Nummer: | 2 |
| URL / URN: | http://dx.doi.org/10.1007/s00216-008-2465-2 |
| Kurzbeschreibung (Abstract): | Multilayered samples consisting of Al, Co and Ni nanolayers were produced by MBE and characterized nondestructively by meansof SRXRF, μ-XRF, WDXRF, RBS, XRR, and destructively with SIMS. The main aims were to identify the elements, to determine their purity and their sequence, and also to examine the roughness, density, homogeneity and thickness of each layer. Most of these important properties could be determined by XRF methods, e.g., on commercial devices. For the thickness, it was found that all of the results obtained via XRR, RBS, SIMS and various XRF methods (SRXRF, μ-XRF, WDXRF) agreed with each other within the limits of uncertainty, and a constant deviation from the presets used in the MBE production method was observed. Some serious preliminary discrepancies in the results from the XRF methods were examined, but all deviations could be explained by introducing various corrections into the evaluation methods and/or redetermining some fundamental parameters. |
| Freie Schlagworte: | Layers; Elements; Oxides; Purity; Sequence; Roughness; Density; Homogeneity; Thickness; XRR; RBS; WDXRF; SRXRF; μ-XRF |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 06 Jul 2009 13:50 |
| Letzte Änderung: | 05 Mär 2013 09:20 |
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