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Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation

Flege, Stefan ; Kraft, Gunther ; Baba, Koumei ; Hatada, Ruriko ; Ensinger, Wolfgang :
Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation.
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2009.01.126]
In: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 267 (8-9) pp. 1531-1535. ISSN 0168583X
[Artikel], (2009)

Offizielle URL: http://dx.doi.org/10.1016/j.nimb.2009.01.126

Kurzbeschreibung (Abstract)

Copper substrates with rather large grains (dimensions of some mm) treated by pulsed methane plasma immersion ion implantation exhibit a laterally inhomogeneous carbon distribution. Areas with high carbon X-ray intensity in electron probe microanalysis coincide with thicker carbon containing layers as seen in sputter depth profiling via secondary ion mass spectrometry. The distribution of carbon within the surface depends not only on the treatment time and pulse repetition rate but also on the orientation of the individual copper grains.

Typ des Eintrags: Artikel
Erschienen: 2009
Autor(en): Flege, Stefan ; Kraft, Gunther ; Baba, Koumei ; Hatada, Ruriko ; Ensinger, Wolfgang
Titel: Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation
Sprache: Englisch
Kurzbeschreibung (Abstract):

Copper substrates with rather large grains (dimensions of some mm) treated by pulsed methane plasma immersion ion implantation exhibit a laterally inhomogeneous carbon distribution. Areas with high carbon X-ray intensity in electron probe microanalysis coincide with thicker carbon containing layers as seen in sputter depth profiling via secondary ion mass spectrometry. The distribution of carbon within the surface depends not only on the treatment time and pulse repetition rate but also on the orientation of the individual copper grains.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Band: 267
(Heft-)Nummer: 8-9
Verlag: Elsevier Science Publishing Company
Freie Schlagworte: Plasma immersion ion implantation; SIMS; EPMA
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Materialanalytik
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 29 Jun 2009 14:35
Offizielle URL: http://dx.doi.org/10.1016/j.nimb.2009.01.126
Zusätzliche Informationen:

Proceedings of the 16th International Conference on Ion Beam Modification of Materials

ID-Nummer: 10.1016/j.nimb.2009.01.126
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