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Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation

Flege, Stefan and Kraft, Gunther and Baba, Koumei and Hatada, Ruriko and Ensinger, Wolfgang (2009):
Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation.
In: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, Elsevier Science Publishing Company, pp. 1531-1535, 267, (8-9), ISSN 0168583X,
[Online-Edition: http://dx.doi.org/10.1016/j.nimb.2009.01.126],
[Article]

Abstract

Copper substrates with rather large grains (dimensions of some mm) treated by pulsed methane plasma immersion ion implantation exhibit a laterally inhomogeneous carbon distribution. Areas with high carbon X-ray intensity in electron probe microanalysis coincide with thicker carbon containing layers as seen in sputter depth profiling via secondary ion mass spectrometry. The distribution of carbon within the surface depends not only on the treatment time and pulse repetition rate but also on the orientation of the individual copper grains.

Item Type: Article
Erschienen: 2009
Creators: Flege, Stefan and Kraft, Gunther and Baba, Koumei and Hatada, Ruriko and Ensinger, Wolfgang
Title: Distribution of carbon in polycrystalline copper surfaces treated by methane plasma immersion ion implantation
Language: English
Abstract:

Copper substrates with rather large grains (dimensions of some mm) treated by pulsed methane plasma immersion ion implantation exhibit a laterally inhomogeneous carbon distribution. Areas with high carbon X-ray intensity in electron probe microanalysis coincide with thicker carbon containing layers as seen in sputter depth profiling via secondary ion mass spectrometry. The distribution of carbon within the surface depends not only on the treatment time and pulse repetition rate but also on the orientation of the individual copper grains.

Journal or Publication Title: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Volume: 267
Number: 8-9
Publisher: Elsevier Science Publishing Company
Uncontrolled Keywords: Plasma immersion ion implantation; SIMS; EPMA
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 29 Jun 2009 14:35
Official URL: http://dx.doi.org/10.1016/j.nimb.2009.01.126
Additional Information:

Proceedings of the 16th International Conference on Ion Beam Modification of Materials

Identification Number: doi:10.1016/j.nimb.2009.01.126
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