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Infrared thermopile sensor based on AlGaAs/GaAs micromachining

Dehé, Alfons and Fricke, and Hartnagel, (1995):
Infrared thermopile sensor based on AlGaAs/GaAs micromachining.
In: Sensors and actuators. A47 (1995), S. 432-436, [Article]

Item Type: Article
Erschienen: 1995
Creators: Dehé, Alfons and Fricke, and Hartnagel,
Title: Infrared thermopile sensor based on AlGaAs/GaAs micromachining
Language: English
Journal or Publication Title: Sensors and actuators. A47 (1995), S. 432-436
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
License: [undefiniert]
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