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Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology

Dehé, Alfons and Fricke, and Mutamba, and Hartnagel, :
Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology.
In: Journal of micromechanics and microengineering. 5 (1995), S. 1-4
[Article] , (1995)

Item Type: Article
Erschienen: 1995
Creators: Dehé, Alfons and Fricke, and Mutamba, and Hartnagel,
Title: Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology
Language: German
Journal or Publication Title: Journal of micromechanics and microengineering. 5 (1995), S. 1-4
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
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