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Überlastfester piezoresistiver Silizium-Hochdrucksensor

Heinickel, Patrick and Werthschützky, Roland (2007):
Überlastfester piezoresistiver Silizium-Hochdrucksensor.
In: Sensor und Test 2007, Nürnberg, Germany, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2007
Creators: Heinickel, Patrick and Werthschützky, Roland
Title: Überlastfester piezoresistiver Silizium-Hochdrucksensor
Language: German
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Event Title: Sensor und Test 2007
Event Location: Nürnberg, Germany
Date Deposited: 20 Nov 2008 08:28
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Poster FMS Dresden

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