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Formation of Diamond-Like Carbon Films by Plasma-Based Ion Implantation md Their Characterization

Ensinger, Wolfgang (2006):
Formation of Diamond-Like Carbon Films by Plasma-Based Ion Implantation md Their Characterization.
In: New diamond and Frontier Carbon Technology, 16 (1), Formation of diamond-like carbon films by plasma-based ion implantation and their characterization, pp. 1-32, [Article]

Abstract

Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with excellent tribological properties. A large number of examples from the literature are discussed in detail, and the process parameters of PBII, such as plasma-forming gas, bias voltage, pulse length, pulse repetition rate and experimental setup, are correlated with the DLC film properties, such as bonding characteristics, stress, hardmess, friction and wear behavior and corrosion protection ability. Trends in the variation of film features with the process parameters are shown, and the underlying physical processes are discussed.

Item Type: Article
Erschienen: 2006
Creators: Ensinger, Wolfgang
Title: Formation of Diamond-Like Carbon Films by Plasma-Based Ion Implantation md Their Characterization
Language: English
Abstract:

Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with excellent tribological properties. A large number of examples from the literature are discussed in detail, and the process parameters of PBII, such as plasma-forming gas, bias voltage, pulse length, pulse repetition rate and experimental setup, are correlated with the DLC film properties, such as bonding characteristics, stress, hardmess, friction and wear behavior and corrosion protection ability. Trends in the variation of film features with the process parameters are shown, and the underlying physical processes are discussed.

Journal or Publication Title: New diamond and Frontier Carbon Technology
Volume: 16
Number: 1
Publisher: Formation of diamond-like carbon films by plasma-based ion implantation and their characterization
Uncontrolled Keywords: plasma-based ion implantation; plasma immersion ion implantation; diamond-like carbon; wear; corrosion; titanium; aluminium; steel
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 20 Nov 2008 08:26
License: [undefiniert]
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