Ensinger, Wolfgang (2006)
Formation of Diamond-Like Carbon Films by Plasma-Based Ion Implantation md Their Characterization.
In: New diamond and Frontier Carbon Technology, 16 (1)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with excellent tribological properties. A large number of examples from the literature are discussed in detail, and the process parameters of PBII, such as plasma-forming gas, bias voltage, pulse length, pulse repetition rate and experimental setup, are correlated with the DLC film properties, such as bonding characteristics, stress, hardmess, friction and wear behavior and corrosion protection ability. Trends in the variation of film features with the process parameters are shown, and the underlying physical processes are discussed.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2006 |
| Autor(en): | Ensinger, Wolfgang |
| Art des Eintrags: | Bibliographie |
| Titel: | Formation of Diamond-Like Carbon Films by Plasma-Based Ion Implantation md Their Characterization |
| Sprache: | Englisch |
| Publikationsjahr: | 17 Februar 2006 |
| Verlag: | Formation of diamond-like carbon films by plasma-based ion implantation and their characterization |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | New diamond and Frontier Carbon Technology |
| Jahrgang/Volume einer Zeitschrift: | 16 |
| (Heft-)Nummer: | 1 |
| Kurzbeschreibung (Abstract): | Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with excellent tribological properties. A large number of examples from the literature are discussed in detail, and the process parameters of PBII, such as plasma-forming gas, bias voltage, pulse length, pulse repetition rate and experimental setup, are correlated with the DLC film properties, such as bonding characteristics, stress, hardmess, friction and wear behavior and corrosion protection ability. Trends in the variation of film features with the process parameters are shown, and the underlying physical processes are discussed. |
| Freie Schlagworte: | plasma-based ion implantation; plasma immersion ion implantation; diamond-like carbon; wear; corrosion; titanium; aluminium; steel |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik |
| Hinterlegungsdatum: | 20 Nov 2008 08:26 |
| Letzte Änderung: | 20 Feb 2020 13:23 |
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