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A new analytical formulation for the design of piezoresistive silicon pressure measurement elements

Stavroulis, Stefanos and Werthschützky, Roland (2002):
A new analytical formulation for the design of piezoresistive silicon pressure measurement elements.
In: International Conference on Sensors & Systems <2002, Sankt-Peterburg>: Sensors & systems, proceedings; Vol. 1.- Sankt-Peterburg, 2002.- S. 66-70, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2002
Creators: Stavroulis, Stefanos and Werthschützky, Roland
Title: A new analytical formulation for the design of piezoresistive silicon pressure measurement elements
Language: English
Series Name: International Conference on Sensors & Systems <2002, Sankt-Peterburg>: Sensors & systems, proceedings; Vol. 1.- Sankt-Peterburg, 2002.- S. 66-70
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Measurement and Sensor Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:16
License: [undefiniert]
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