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III-V compound MEMS solutions for sensors and optical communications

Mutamba, Kabula and Pfeiffer, J. and Beilenhoff, K. and Peerlings, J. and Megej, A. and Meissner, P. and Hartnagel, H. L. (2000):
III-V compound MEMS solutions for sensors and optical communications.
In: Symposium on Microsystem Technology <2000, National Cheng Kung Univ., Taiwan>: Proceedings. S. 163-169, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2000
Creators: Mutamba, Kabula and Pfeiffer, J. and Beilenhoff, K. and Peerlings, J. and Megej, A. and Meissner, P. and Hartnagel, H. L.
Title: III-V compound MEMS solutions for sensors and optical communications
Language: English
Series Name: Symposium on Microsystem Technology <2000, National Cheng Kung Univ., Taiwan>: Proceedings. S. 163-169
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:25
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