Roldán, Diego ; Redenbach, Claudia ; Schladitz, Katja ; Kübel, Christian ; Schlabach, Sabine (2024)
Image quality evaluation for FIB‐SEM images.
In: Journal of Microscopy, 293 (2)
doi: 10.1111/jmi.13254
Artikel, Bibliographie
Dies ist die neueste Version dieses Eintrags.
Kurzbeschreibung (Abstract)
Focused ion beam scanning electron microscopy (FIB‐SEM) tomography is a serial sectioning technique where an FIB mills off slices from the material sample that is being analysed. After every slicing, an SEM image is taken showing the newly exposed layer of the sample. By combining all slices in a stack, a 3D image of the material is generated. However, specific artefacts caused by the imaging technique distort the images, hampering the morphological analysis of the structure. Typical quality problems in microscopy imaging are noise and lack of contrast or focus. Moreover, specific artefacts are caused by the FIB milling, namely, curtaining and charging artefacts. We propose quality indices for the evaluation of the quality of FIB‐SEM data sets. The indices are validated on real and experimental data of different structures and materials.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2024 |
| Autor(en): | Roldán, Diego ; Redenbach, Claudia ; Schladitz, Katja ; Kübel, Christian ; Schlabach, Sabine |
| Art des Eintrags: | Bibliographie |
| Titel: | Image quality evaluation for FIB‐SEM images |
| Sprache: | Englisch |
| Publikationsjahr: | Februar 2024 |
| Ort: | Oxford |
| Verlag: | Wiley-Blackwell |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Journal of Microscopy |
| Jahrgang/Volume einer Zeitschrift: | 293 |
| (Heft-)Nummer: | 2 |
| DOI: | 10.1111/jmi.13254 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | Focused ion beam scanning electron microscopy (FIB‐SEM) tomography is a serial sectioning technique where an FIB mills off slices from the material sample that is being analysed. After every slicing, an SEM image is taken showing the newly exposed layer of the sample. By combining all slices in a stack, a 3D image of the material is generated. However, specific artefacts caused by the imaging technique distort the images, hampering the morphological analysis of the structure. Typical quality problems in microscopy imaging are noise and lack of contrast or focus. Moreover, specific artefacts are caused by the FIB milling, namely, curtaining and charging artefacts. We propose quality indices for the evaluation of the quality of FIB‐SEM data sets. The indices are validated on real and experimental data of different structures and materials. |
| Freie Schlagworte: | blur, charging artefacts, contrast, curtaining artefacts, no‐reference evaluation, noise |
| Sachgruppe der Dewey Dezimalklassifikatin (DDC): | 500 Naturwissenschaften und Mathematik > 540 Chemie 500 Naturwissenschaften und Mathematik > 570 Biowissenschaften, Biologie |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > In-Situ Elektronenmikroskopie 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Gemeinschaftslabor Nanomaterialien |
| Hinterlegungsdatum: | 05 Jun 2024 09:25 |
| Letzte Änderung: | 05 Jun 2024 11:56 |
| PPN: | 518840999 |
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| Suche nach Titel in: | TUfind oder in Google |
Verfügbare Versionen dieses Eintrags
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Image quality evaluation for FIB‐SEM images. (deposited 04 Jun 2024 12:29)
- Image quality evaluation for FIB‐SEM images. (deposited 05 Jun 2024 09:25) [Gegenwärtig angezeigt]
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