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A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology

Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel, (1995):
A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology.
In: Journal of micromechanics and microengineering. 5 (1995), S. 139-142, [Article]

Item Type: Article
Erschienen: 1995
Creators: Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel,
Title: A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology
Language: German
Journal or Publication Title: Journal of micromechanics and microengineering. 5 (1995), S. 139-142
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:24
License: [undefiniert]
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