Ricohermoso, Emmanuel III ; Solano Arana, Susana ; Fasel, Claudia ; Riedel, Ralf ; Ionescu, Emanuel (2023)
SiOC-based strain gauge with ultrahigh piezoresistivity at high temperatures.
In: ACS Applied Engineering Materials, 1 (4)
doi: 10.1021/acsaenm.2c00201
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
The nonlinear response of strain gauges at high temperatures has restricted their applications despite their high-precision and real-time measurement capability. This work addresses this limitation by utilizing the easy preparative access and versatility of silicon oxycarbide-based (SiOC) thin films as strain gauges offering outstanding high-temperature robustness and giant piezoresistive response. The sensitivity of the strain gauge is assessed with continuous cyclic loads, tensile and compressive, resulting in gauge factors of ca. 2000–5000. The linearity of the response is preserved up to 700 °C with a shift in the electrical response occurring at temperatures beyond 500 °C, switching the SiOC film from semiconducting to conducting behavior. This change causes a drop in the gauge factor of the SiOC-based thin films; nevertheless, it is still significantly higher than that of metallic and Si-based commercial strain gauges. Notably, the studied thin films can regulate the effect of temperature enabling them to be a highly sensitive device with good reversibility and replicability in high-temperature environments. Furthermore, the electrical shift at 460 °C broadens the application of the SiOC film as a current-limiting device and temperature sensor.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2023 |
| Autor(en): | Ricohermoso, Emmanuel III ; Solano Arana, Susana ; Fasel, Claudia ; Riedel, Ralf ; Ionescu, Emanuel |
| Art des Eintrags: | Bibliographie |
| Titel: | SiOC-based strain gauge with ultrahigh piezoresistivity at high temperatures |
| Sprache: | Englisch |
| Publikationsjahr: | 13 März 2023 |
| Verlag: | ACS Pubilcations |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | ACS Applied Engineering Materials |
| Jahrgang/Volume einer Zeitschrift: | 1 |
| (Heft-)Nummer: | 4 |
| DOI: | 10.1021/acsaenm.2c00201 |
| Kurzbeschreibung (Abstract): | The nonlinear response of strain gauges at high temperatures has restricted their applications despite their high-precision and real-time measurement capability. This work addresses this limitation by utilizing the easy preparative access and versatility of silicon oxycarbide-based (SiOC) thin films as strain gauges offering outstanding high-temperature robustness and giant piezoresistive response. The sensitivity of the strain gauge is assessed with continuous cyclic loads, tensile and compressive, resulting in gauge factors of ca. 2000–5000. The linearity of the response is preserved up to 700 °C with a shift in the electrical response occurring at temperatures beyond 500 °C, switching the SiOC film from semiconducting to conducting behavior. This change causes a drop in the gauge factor of the SiOC-based thin films; nevertheless, it is still significantly higher than that of metallic and Si-based commercial strain gauges. Notably, the studied thin films can regulate the effect of temperature enabling them to be a highly sensitive device with good reversibility and replicability in high-temperature environments. Furthermore, the electrical shift at 460 °C broadens the application of the SiOC film as a current-limiting device and temperature sensor. |
| Freie Schlagworte: | polymer-derived ceramics, conductivity, giant piezoresistivity, strain gauge, temperature coefficient of resistivity |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Integrierte Mikro-Nano-Systeme |
| TU-Projekte: | DFG|IO64/14-1|Heisenberg-Förderung |
| Hinterlegungsdatum: | 16 Mai 2023 05:49 |
| Letzte Änderung: | 16 Mai 2023 05:49 |
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