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Influence of single-source precursors on PACVD-derived boron carbonitride thin films

Hegemann, Dirk ; Riedel, Ralf ; Oehr, C. (1999)
Influence of single-source precursors on PACVD-derived boron carbonitride thin films.
In: Thin Solid Films, 339 (1-2)
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor.

Typ des Eintrags: Artikel
Erschienen: 1999
Autor(en): Hegemann, Dirk ; Riedel, Ralf ; Oehr, C.
Art des Eintrags: Bibliographie
Titel: Influence of single-source precursors on PACVD-derived boron carbonitride thin films
Sprache: Englisch
Publikationsjahr: 8 Februar 1999
Verlag: Elsevier
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Thin Solid Films
Jahrgang/Volume einer Zeitschrift: 339
(Heft-)Nummer: 1-2
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Kurzbeschreibung (Abstract):

This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor.

Freie Schlagworte: Boron carbonitride, Pyridine-borane, Triazaborabicyclodecane, r.f. plasma, Self-bias
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe
Hinterlegungsdatum: 19 Nov 2008 16:23
Letzte Änderung: 07 Jan 2021 12:06
PPN:
Sponsoren: R.R. gratefully acknowledges the financial support by the Fonds der Chemischen Industrie, Frankfurt.
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