Hegemann, Dirk ; Riedel, Ralf ; Oehr, C. (1999)
Influence of single-source precursors on PACVD-derived boron carbonitride thin films.
In: Thin Solid Films, 339 (1-2)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 1999 |
| Autor(en): | Hegemann, Dirk ; Riedel, Ralf ; Oehr, C. |
| Art des Eintrags: | Bibliographie |
| Titel: | Influence of single-source precursors on PACVD-derived boron carbonitride thin films |
| Sprache: | Englisch |
| Publikationsjahr: | 8 Februar 1999 |
| Verlag: | Elsevier |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Thin Solid Films |
| Jahrgang/Volume einer Zeitschrift: | 339 |
| (Heft-)Nummer: | 1-2 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor. |
| Freie Schlagworte: | Boron carbonitride, Pyridine-borane, Triazaborabicyclodecane, r.f. plasma, Self-bias |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe |
| Hinterlegungsdatum: | 19 Nov 2008 16:23 |
| Letzte Änderung: | 07 Jan 2021 12:06 |
| PPN: | |
| Sponsoren: | R.R. gratefully acknowledges the financial support by the Fonds der Chemischen Industrie, Frankfurt. |
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