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Silicon microphones: an overview

Fischer, Marc and Sessler, Gerhard M. (1999):
Silicon microphones: an overview.
In: Forum acusticum <2, 1999, Berlin>: Joint Meeting Berlin 99 - ASA (Acoustical Society of America) EAA (European Acoustics Association) DAGA; Collected papers; Paper No. 2aEA1. - Stuttgart: Hirzel, 1999, Stuttgart, Hirzel, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Fischer, Marc and Sessler, Gerhard M.
Title: Silicon microphones: an overview
Language: German
Series Name: Forum acusticum <2, 1999, Berlin>: Joint Meeting Berlin 99 - ASA (Acoustical Society of America) EAA (European Acoustics Association) DAGA; Collected papers; Paper No. 2aEA1. - Stuttgart: Hirzel, 1999
Place of Publication: Stuttgart
Publisher: Hirzel
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:22
License: [undefiniert]
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