Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Dietz, Christian ; Ensinger, Wolfgang ; Baba, Koumei (2019)
Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions.
In: Coatings, 9 (2)
doi: 10.3390/coatings9020125
Artikel, Bibliographie
Dies ist die neueste Version dieses Eintrags.
Kurzbeschreibung (Abstract)
A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2019 |
| Autor(en): | Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Dietz, Christian ; Ensinger, Wolfgang ; Baba, Koumei |
| Art des Eintrags: | Bibliographie |
| Titel: | Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions |
| Sprache: | Englisch |
| Publikationsjahr: | 18 Februar 2019 |
| Verlag: | MDPI |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Coatings |
| Jahrgang/Volume einer Zeitschrift: | 9 |
| (Heft-)Nummer: | 2 |
| DOI: | 10.3390/coatings9020125 |
| URL / URN: | https://doi.org/10.3390/coatings9020125 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness. |
| Freie Schlagworte: | diamond-like carbon, surface morphology, deposition, metal, etching, dealloying, nanostructures |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Dünne Schichten 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Physics of Surfaces |
| Hinterlegungsdatum: | 14 Feb 2020 10:02 |
| Letzte Änderung: | 21 Nov 2023 07:13 |
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| Suche nach Titel in: | TUfind oder in Google |
Verfügbare Versionen dieses Eintrags
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Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions. (deposited 20 Nov 2023 14:55)
- Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions. (deposited 14 Feb 2020 10:02) [Gegenwärtig angezeigt]
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