Hoche, Holger ; Pusch, Casper ; Riedel, Ralf ; Fasel, Claudia ; Klein, Andreas (2010)
Properties of SiCN coatings for high temperature applications — Comparison of RF-, DC- and HPPMS-sputtering.
In: Surface and Coatings Technology, 205
doi: 10.1016/j.surfcoat.2010.03.039
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Since most conventional coatings are not stable at temperatures above 1000 °C, new coating concepts have to be introduced. Si–C–N based materials exhibit promising properties such as excellent oxidation resistance and thermal stability even at temperatures above 1300 °C.
In the present study amorphous PVD–SiCN coatings were synthesized by conventional DC- and RF-magnetron sputtering as well as with a combined sputtering process using one target in the DC mode and one target in the HPPMS (High Power Pulse Magnetron Sputtering) mode. The coatings were characterized regarding their chemical, structural and mechanical properties. The coating properties strongly depend on the chemical composition and the structure of the amorphous network. Beyond that, the study includes thermal analysis of the coating materials, synthesized with the different sputtering techniques
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2010 |
| Autor(en): | Hoche, Holger ; Pusch, Casper ; Riedel, Ralf ; Fasel, Claudia ; Klein, Andreas |
| Art des Eintrags: | Bibliographie |
| Titel: | Properties of SiCN coatings for high temperature applications — Comparison of RF-, DC- and HPPMS-sputtering |
| Sprache: | Englisch |
| Publikationsjahr: | 25 Dezember 2010 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Surface and Coatings Technology |
| Jahrgang/Volume einer Zeitschrift: | 205 |
| DOI: | 10.1016/j.surfcoat.2010.03.039 |
| URL / URN: | https://doi.org/10.1016/j.surfcoat.2010.03.039 |
| Kurzbeschreibung (Abstract): | Since most conventional coatings are not stable at temperatures above 1000 °C, new coating concepts have to be introduced. Si–C–N based materials exhibit promising properties such as excellent oxidation resistance and thermal stability even at temperatures above 1300 °C. In the present study amorphous PVD–SiCN coatings were synthesized by conventional DC- and RF-magnetron sputtering as well as with a combined sputtering process using one target in the DC mode and one target in the HPPMS (High Power Pulse Magnetron Sputtering) mode. The coatings were characterized regarding their chemical, structural and mechanical properties. The coating properties strongly depend on the chemical composition and the structure of the amorphous network. Beyond that, the study includes thermal analysis of the coating materials, synthesized with the different sputtering techniques |
| Freie Schlagworte: | Physical vapour deposition (PVD), SiCN, Thermal properties, Degradation |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung |
| Hinterlegungsdatum: | 18 Dez 2018 07:27 |
| Letzte Änderung: | 18 Dez 2018 07:27 |
| PPN: | |
| Sponsoren: | The authors acknowledge the financial support of the German Research Foundation (DFG), Project No. HO3315/9-1. |
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