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Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Mota-Santiago, P. ; Vázquez, H. ; Bierschenk, T. ; Kremer, F. ; Nadzri, A. ; Schauries, D. ; Djurabekova, F. ; Nordlund, K. ; Trautmann, C. ; Mudie, S. ; Ridgway, M. C. ; Kluth, P. :
Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide.
[Online-Edition: https://doi.org/10.1088/1361-6528/aaabdb]
In: Nanotechnology, 29 (14) S. 144004. ISSN 0957-4484
[Artikel] , (2018)

Offizielle URL: https://doi.org/10.1088/1361-6528/aaabdb

Kurzbeschreibung (Abstract)

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN x :H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO x :H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

Typ des Eintrags: Artikel
Erschienen: 2018
Autor(en): Mota-Santiago, P. ; Vázquez, H. ; Bierschenk, T. ; Kremer, F. ; Nadzri, A. ; Schauries, D. ; Djurabekova, F. ; Nordlund, K. ; Trautmann, C. ; Mudie, S. ; Ridgway, M. C. ; Kluth, P.
Titel: Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide
Sprache: Englisch
Kurzbeschreibung (Abstract):

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN x :H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO x :H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Nanotechnology
Band: 29
(Heft-)Nummer: 14
Verlag: IOP Publishing
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien
Hinterlegungsdatum: 10 Dez 2018 08:46
DOI: 10.1088/1361-6528/aaabdb
Offizielle URL: https://doi.org/10.1088/1361-6528/aaabdb
Sponsoren: P Mota-Santiago would like to thank the Consejo Nacional de Ciencia y Tencologia (CONACyT)., This work was performed at the SAXS/WAXS beamline at the Australian Synchrotron., P Kluth and M C Ridgway thank the Australian Research Council for financial support.
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