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Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Mota-Santiago, P. and Vázquez, H. and Bierschenk, T. and Kremer, F. and Nadzri, A. and Schauries, D. and Djurabekova, F. and Nordlund, K. and Trautmann, C. and Mudie, S. and Ridgway, M. C. and Kluth, P. :
Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide.
[Online-Edition: https://doi.org/10.1088/1361-6528/aaabdb]
In: Nanotechnology, 29 (14) p. 144004. ISSN 0957-4484
[Article] , (2018)

Official URL: https://doi.org/10.1088/1361-6528/aaabdb

Abstract

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN x :H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO x :H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

Item Type: Article
Erschienen: 2018
Creators: Mota-Santiago, P. and Vázquez, H. and Bierschenk, T. and Kremer, F. and Nadzri, A. and Schauries, D. and Djurabekova, F. and Nordlund, K. and Trautmann, C. and Mudie, S. and Ridgway, M. C. and Kluth, P.
Title: Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide
Language: English
Abstract:

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN x :H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO x :H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

Journal or Publication Title: Nanotechnology
Volume: 29
Number: 14
Publisher: IOP Publishing
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Ion-Beam-Modified Materials
Date Deposited: 10 Dec 2018 08:46
DOI: 10.1088/1361-6528/aaabdb
Official URL: https://doi.org/10.1088/1361-6528/aaabdb
Funders: P Mota-Santiago would like to thank the Consejo Nacional de Ciencia y Tencologia (CONACyT)., This work was performed at the SAXS/WAXS beamline at the Australian Synchrotron., P Kluth and M C Ridgway thank the Australian Research Council for financial support.
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