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Electrical characterization and failure analysis using operando TEM

Pivak, Yevheniy and Perez-Garza, Hector H. and Zintler, Alexander and Molina-Luna, Leopoldo (2017):
Electrical characterization and failure analysis using operando TEM.
pp. 353-357, ASM INTERNATIONAL, 9503 KINSMAN RD, MATERIALS PARK, OH 44073 USA, ISTFA 2017: Proceedings from the 43rd International Symposium for Testing and Failure Analysis, Pasadena, Californien, USA, 5.9.2017, [Conference or Workshop Item]

Abstract

We present here the development of a system that allows for in-situ studies inside the Transmission Electron Microscope (TEM). Functionalized Microelectromechanical Systems (MEMS) used as sample carriers, referred to as Nano-Chips, contain up to eight electrodes used for simultaneous biasing and heating purposes, enabling electro-thermal characterization of various sample types inside the TEM under real life dynamic conditions. This operando approach is an ideal method to study failure analysis of semiconductor materials, performance of resistive switching devices, batteries, fuel cells, piezoceramics and many more.

Item Type: Conference or Workshop Item
Erschienen: 2017
Creators: Pivak, Yevheniy and Perez-Garza, Hector H. and Zintler, Alexander and Molina-Luna, Leopoldo
Title: Electrical characterization and failure analysis using operando TEM
Language: English
Abstract:

We present here the development of a system that allows for in-situ studies inside the Transmission Electron Microscope (TEM). Functionalized Microelectromechanical Systems (MEMS) used as sample carriers, referred to as Nano-Chips, contain up to eight electrodes used for simultaneous biasing and heating purposes, enabling electro-thermal characterization of various sample types inside the TEM under real life dynamic conditions. This operando approach is an ideal method to study failure analysis of semiconductor materials, performance of resistive switching devices, batteries, fuel cells, piezoceramics and many more.

Publisher: ASM INTERNATIONAL, 9503 KINSMAN RD, MATERIALS PARK, OH 44073 USA
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Electron Microscopy (aem)
Event Title: ISTFA 2017: Proceedings from the 43rd International Symposium for Testing and Failure Analysis
Event Location: Pasadena, Californien, USA
Event Dates: 5.9.2017
Date Deposited: 10 Dec 2018 10:12
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