Perez-Garza, Hector H. ; Pivak, Y. ; Molina-Luna, Leopoldo ; Omme, J. T. van ; Spruit, Ronald G. ; Sholkina, M. ; Pen, M. ; Xu, Q. (2017)
MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis.
19th International Conference on Solid-State Sensors. Kaohsiung, Taiwan (08.06.2017-22.06.2017)
doi: 10.1109/TRANSDUCERS.2017.7994502
Konferenzveröffentlichung, Bibliographie
Kurzbeschreibung (Abstract)
We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2017 |
| Autor(en): | Perez-Garza, Hector H. ; Pivak, Y. ; Molina-Luna, Leopoldo ; Omme, J. T. van ; Spruit, Ronald G. ; Sholkina, M. ; Pen, M. ; Xu, Q. |
| Art des Eintrags: | Bibliographie |
| Titel: | MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis |
| Sprache: | Englisch |
| Publikationsjahr: | 18 Juni 2017 |
| Ort: | PISCATAWAY, NJ |
| Verlag: | IEEE |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Transducers |
| Buchtitel: | IEEE sensors letters Institute of Electrical and Electronics Engineers |
| Veranstaltungstitel: | 19th International Conference on Solid-State Sensors |
| Veranstaltungsort: | Kaohsiung, Taiwan |
| Veranstaltungsdatum: | 08.06.2017-22.06.2017 |
| DOI: | 10.1109/TRANSDUCERS.2017.7994502 |
| Kurzbeschreibung (Abstract): | We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields. |
| Freie Schlagworte: | MEMS, heating, biasing, in-situ, TEM |
| ID-Nummer: | Electronic ISSN: 2167-0021 |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Elektronenmikroskopie |
| Hinterlegungsdatum: | 06 Dez 2018 10:17 |
| Letzte Änderung: | 17 Aug 2021 07:39 |
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