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Selective area growth of InP by plasma assisted solid-source epitaxy

Aller, Ingo and Hartnagel, H. L. :
Selective area growth of InP by plasma assisted solid-source epitaxy.
In: Journal of electronic materials. 25 (1996), S. 421-424
[Article] , (1996)

Item Type: Article
Erschienen: 1996
Creators: Aller, Ingo and Hartnagel, H. L.
Title: Selective area growth of InP by plasma assisted solid-source epitaxy
Language: English
Journal or Publication Title: Journal of electronic materials. 25 (1996), S. 421-424
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:20
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