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Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013)
Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013.
Mikrosystemtechnik Kongress 2013. Aachen (14.-16- Oktober 2013)
Conference or Workshop Item, Bibliographie
Greiner, Felix ; Dassinger, Florian ; Quednau, Sebastian ; Sarwar, Reza ; Hottes, Martin ; Stegmann, Christian ; Rauber, Markus ; Trautmann, Christina ; Schlaak, Helmut F. ; Ensinger, Wolfgang (2013)
Integration of nanowires onto 100 mm wafers by the growth in-place method.
Report, Bibliographie
Rossner, Tim ; Lyashenko, Alexandra ; Dörsam, Edgar ; Sarwar, Reza ; Werthschützky, Roland (2013)
Hot Stamped Conductors on Nano-Micro Wires Made by Electroplating for Medical Sensors and Micro-Implants.
Nürnberg (14.-16.05.2013)
Conference or Workshop Item, Bibliographie
Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013)
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering
doi: 10.1088/0960-1317/23/2/025018
Article, Bibliographie