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Number of items: 3.

Zhou, Y. and Yan, X. and Kroke, E. and Riedel, R. and Probst, D. and Thissen, A. and Hauser, R. and Ahles, M. and von Seggern, H. (2006):
Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film.
In: Materialwissenschaft und Werkstofftechnik, Wiley-VCH Verlag GmbH, Weinheim, pp. 173-177, 37, (2), ISSN 0933-5137,
DOI: 10.1002/mawe.200600993,
[Online-Edition: https://doi.org/10.1002/mawe.200600993],
[Article]

Zhou, Y. and Yan, X. and Kroke, E. and Riedel, R. and Probst, D. and Thissen, A. and Hauser, R. and Ahles, Marcus and von Seggern, Heinz (2006):
Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated.
In: Materialwissenschaft und Werkstofftechnik, p. 173, 37, [Article]

Zhou, Y. and Probst, D. and Thissen, A. and Kroke, E. and Riedel, R. and Hauser, R. and Hoche, H. and Bfroszeit, E. and Kroll, P. and Stafast, H. (2006):
Hard Silicon carbonitride films obtained by RF-plasma-enhanced chemical yapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide.
In: Journal of the European Ceramic Society, pp. 1325-1335, 26, [Article]

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