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Ensinger, Wolfgang and Flege, Stefan and Hatada, Ruriko and Ayata, Sevda and Matsutani, Takaomi and Baba, Koumei (2013):
Hermetic Protection of Rings by Ion Beam Sputter Coating with a Broad Beam Ion Source and a W-Shaped Hollow Sputter Target.
In: Transactions of the Materials Research Society of Japan, The Materials Research Society of Japan, pp. 97-100, 38, (1), [Article]

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