TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Martínez-Crespiera, S. and Ionescu, E. and Schlosser, M. and Flittner, K. and Mistura, G. and Riedel, R. and Schlaak, H. F. (2011):
Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches.
In: Sensors and Actuators A: Physical, Elsevier, pp. 242-249, 169, (1), ISSN 09244247,
[Online-Edition: http://dx.doi.org/10.1016/j.sna.2011.04.041],
[Article]

This list was generated on Sat Aug 24 01:56:37 2019 CEST.