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Savran, C.A. and Sparks, A.W. and Sihler, J. and Li, Jian and Wu, Wan-Chen and Berlin, D.E. and Burg, T.P. and Fritz, J. and Schmidt, M.A. and Manalis, S.R. (2002):
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions.
In: Journal of Microelectromechanical Systems, pp. 703-708, 11, (6), ISSN 1057-7157,
DOI: 10.1109/JMEMS.2002.805057,
[Online-Edition: https://doi.org/10.1109/JMEMS.2002.805057],
[Article]

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