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Courtois, B. ; Karam, J. M. ; Lubaszewski, M. ; Szekely, V. ; Rencz, M. ; Hofmann, K. ; Glesner, M. (1997):
CAD tools and foundries to boost microsystems development.
In: Materials Science and Engineering: B, pp. 242-253,
Elsevier B.V., International Conference on Low Dimensional Structures and Devices (LDSD II), Lisbon, Portugal, 19.-21.05.1997, ISSN 0921-5107,
DOI: 10.1016/S0921-5107(97)00269-9,
[Conference or Workshop Item]

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