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Lang, Markus (1998)
Entwurfsmethoden und rapid prototyping integrierter Mikrosysteme.
Technische Universität Darmstadt
Ph.D. Thesis, Bibliographie
Lang, Markus ; Glesner, Manfred (1997)
Automatic mask adaptation of CMOS-compatible micromachined devices using their finite element model.
MME' 97: Micromechanics Europe. Southampton (31st August - 2nd September 1997)
Conference or Workshop Item, Bibliographie
Lang, Markus ; Davidov, D. ; Glesner, Manfred (1997)
Automatic transfer of parametric FEMmodels into CAD-layout formats for top-down design of microsystems.
Proceedings European Design and Test Conference. ED & TC 97. Paris, France (17.03.1997-20.03.1997)
doi: 10.1109/EDTC.1997.582359
Conference or Workshop Item, Bibliographie
Lang, Markus ; Hofmann, Klaus ; Glesner, Manfred (1997)
FEM-Modelle von Mikrosystemkomponenten - Schnittstelle zu unterschiedlichen Abstraktionsebenen.
Workshop Wissenschaftliches Rechnen in der Elektrotechnik. Darmstadt (19.06.-20.06.97)
Conference or Workshop Item, Bibliographie
Lang, Markus ; Hofmann, Klaus ; Glesner, Manfred (1997)
Using FEM models for the generation of microcomponent descriptions on various levels of interest.
LDSD'97. Lissabon, Portugal (May 19 - 21, 1997)
Conference or Workshop Item, Bibliographie
Lang, Markus (1997)
An acceleration sensor in cmos-compatible technology for integration in complex systems.
In: Journal of micromechanics and microengineering. 7 (1997), 3, S. 193-195
Article, Bibliographie
Lang, Markus ; Glesner, Manfred (1996)
Entwurf eines mikromechanischen Beschleunigungssensors in CMOS-kompatibler Technologie.
3. GI/GMM/ITG-Workshop Methoden und Werkzeuge zum Entwurf von Mikrosystemen. Frankfurt, Germany (27 to 28. June 1996)
Conference or Workshop Item, Bibliographie
Lang, Markus (1996)
An acceleration sensor in CMOS-compatible technology for integration in complex systems.
Conference or Workshop Item, Bibliographie