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Gründl, T. and Zogal, K. and Debernardi, P. and Gierl, C. and Grasse, C. and Geiger, K. and Meyer, R. and Boehm, G. and Amann, M.-C. and Meissner, P. and Küppers, F. (2013):
50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength.
In: Semiconductor Science and Technology, 28 (01), ISSN 0268-1242,

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