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Hildebrandt, E. ; Kurian, J. ; Zimmermann, J. ; Fleissner, A. ; Seggern, H. von ; Alff, L. (2009)
Hafnium oxide thin films: Effect of growth parameters on oxygen and hafnium vacancies.
In: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27 (1)
doi: 10.1116/1.3043474
Article, Bibliographie

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