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Mutamba, Kabula ; Pfeiffer, J. ; Peerlings, J. ; Riemenschneider, R. ; Vogt, Alexander ; Dehé, A. ; Brauch, M. ; Meister, B. ; Dragojevic, N. (1997)
ANSYS-structural design of micromachined Fabry-Pérot filter with planar membranes.
Conference or Workshop Item, Bibliographie

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