Berberich, Stephan (2000):
SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones.
Aachen, Shaker, TU Darmstadt,
[Ph.D. Thesis]

Berberich, Stephan ; Godignon, P. ; Millan, J. ; Planson, D. ; Hartnagel, H. L. ; Senses, A. (1999):
Electrical characterisation of MNOS devices on p-type 6H-SiC.
In: Diamond and related materials, 8, pp. 305-308. [Article]

Berberich, Stephan ; Godignon, P. ; Morvan, E. ; Fonseca, L. ; Millan, J. ; Hartnagel, H. L. (1999):
Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC.
In: Workshop on Dielectrics <10, 1999, Barcelona>: Proceedings, [Conference or Workshop Item]