Berberich, Stephan (2000)
SiC Processing technology for fabricating MOSFET devices and micromachined condenser microphones.
TU Darmstadt
Ph.D. Thesis

Berberich, Stephan ; Godignon, P. ; Millan, J. ; Planson, D. ; Hartnagel, H. L. ; Senses, A. (1999)
Electrical characterisation of MNOS devices on p-type 6H-SiC.
In: Diamond and related materials, 8
Article

Berberich, Stephan ; Godignon, P. ; Morvan, E. ; Fonseca, L. ; Millan, J. ; Hartnagel, H. L. (1999)
Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC.
Conference or Workshop Item