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Interferometrical profilometry at surfaces with varying materials

Jennewein, Holger ; Gottschling, H. ; Ganz, T. ; Tschudi, Theo (1999)
Interferometrical profilometry at surfaces with varying materials.
In: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings
Book Section, Bibliographie

Item Type: Book Section
Erschienen: 1999
Creators: Jennewein, Holger ; Gottschling, H. ; Ganz, T. ; Tschudi, Theo
Type of entry: Bibliographie
Title: Interferometrical profilometry at surfaces with varying materials
Language: German
Date: 1999
Book Title: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings
Series: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings
Series Volume: 3677
Divisions: 05 Department of Physics
Date Deposited: 19 Nov 2008 16:05
Last Modified: 24 Sep 2024 09:02
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