Flege, S. ; Hatada, R. ; Derepa, A. ; Dietz, C. ; Ensinger, W. ; Baba, K. (2017):
Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition.
In: Review of Scientific Instruments, 88 (9), pp. 096106. AIP Publications, ISSN 0034-6748,
DOI: 10.1063/1.4995080,
[Article]
Abstract
A sample holder with a large open area offers several benefits when used in the process of plasma immersion ion implantation and deposition in which the plasma is generated by a high voltage applied to the sample holder: The ignition voltage of the plasma is lower, and the deposition rate can be several times higher than in the case of a normal plate-like holder. There is a more pronounced edge effect regarding the film thickness. Other film properties are also affected; for diamond-like carbon films, the film structure exhibits more disorder. The hardness of the samples is similar, with the surfaces of the samples being very smooth.
| Item Type: | Article |
|---|---|
| Erschienen: | 2017 |
| Creators: | Flege, S. ; Hatada, R. ; Derepa, A. ; Dietz, C. ; Ensinger, W. ; Baba, K. |
| Title: | Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition |
| Language: | English |
| Abstract: | A sample holder with a large open area offers several benefits when used in the process of plasma immersion ion implantation and deposition in which the plasma is generated by a high voltage applied to the sample holder: The ignition voltage of the plasma is lower, and the deposition rate can be several times higher than in the case of a normal plate-like holder. There is a more pronounced edge effect regarding the film thickness. Other film properties are also affected; for diamond-like carbon films, the film structure exhibits more disorder. The hardness of the samples is similar, with the surfaces of the samples being very smooth. |
| Journal or Publication Title: | Review of Scientific Instruments |
| Volume of the journal: | 88 |
| Issue Number: | 9 |
| Publisher: | AIP Publications |
| Uncontrolled Keywords: | Etching, Thin films, Analytical chemistry, Carbon based materials, Ceramics |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces |
| Date Deposited: | 28 Dec 2017 12:03 |
| DOI: | 10.1063/1.4995080 |
| URL / URN: | https://doi.org/10.1063/1.4995080 |
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