Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. (1999)
High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining.
In: Indo-Russian Workshop on Micromechanical Systems
Book Section, Bibliographie
| Item Type: | Book Section |
|---|---|
| Erschienen: | 1999 |
| Creators: | Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. |
| Type of entry: | Bibliographie |
| Title: | High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining |
| Language: | English |
| Date: | 1999 |
| Book Title: | Indo-Russian Workshop on Micromechanical Systems |
| Series: | SPIE Proceedings |
| Series Volume: | 3903 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 16:05 |
| Last Modified: | 24 Sep 2024 09:27 |
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