Iida, T. ; Makita, ; Shima, ; Kimura, ; Horn, ; Hartnagel, ; Uekusa, (1996):
C+-energy-dependent residual ion damage in GaAs: C grown by the low-energy ion-beam doping method.
In: Journal of applied physics. 80 (1996), 7, [Article]
Item Type: | Article |
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Erschienen: | 1996 |
Creators: | Iida, T. ; Makita, ; Shima, ; Kimura, ; Horn, ; Hartnagel, ; Uekusa, |
Title: | C+-energy-dependent residual ion damage in GaAs: C grown by the low-energy ion-beam doping method |
Language: | English |
Journal or Publication Title: | Journal of applied physics. 80 (1996), 7 |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
Date Deposited: | 19 Nov 2008 16:04 |
License: | [undefiniert] |
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