| Item Type: |
Conference or Workshop Item
|
| Erschienen: |
1997 |
| Creators: |
Lang, Markus ; Glesner, Manfred |
| Type of entry: |
Bibliographie |
| Title: |
Automatic mask adaptation of CMOS-compatible micromachined devices using their finite element model |
| Language: |
English |
| Date: |
1 January 1997 |
| Place of Publication: |
Southampton |
| Publisher: |
Southampton University Microelectronics Centre |
| Book Title: |
MME '97, 31. august - 2. september 1997, Southampton England ; proceedings Micromechanics Europe 1997 |
| Event Title: |
MME' 97: Micromechanics Europe |
| Event Location: |
Southampton |
| Event Dates: |
31st August - 2nd September 1997 |
| Divisions: |
18 Department of Electrical Engineering and Information Technology |
| Date Deposited: |
19 Nov 2008 16:04 |
| Last Modified: |
11 Oct 2023 11:31 |
| PPN: |
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| Export: |
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