Lang, Markus (1997)
An acceleration sensor in cmos-compatible technology for integration in complex systems.
In: Journal of micromechanics and microengineering. 7 (1997), 3, S. 193-195
Article
| Item Type: | Article |
|---|---|
| Erschienen: | 1997 |
| Creators: | Lang, Markus |
| Type of entry: | Bibliographie |
| Title: | An acceleration sensor in cmos-compatible technology for integration in complex systems |
| Language: | English |
| Date: | 1 January 1997 |
| Journal or Publication Title: | Journal of micromechanics and microengineering. 7 (1997), 3, S. 193-195 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 16:04 |
| Last Modified: | 20 Feb 2020 13:30 |
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