Kaloumenos, Mareiki ; Hofmann, Klaus ; Spiehl, Dieter ; Hoffmann, Rudolf C. ; Precht, Ruben ; Bonrad, Klaus (2016):
Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere.
In: Thin Solid Films, 600, pp. 59-64. Elsevier ScienceDirect, ISSN 00406090,
DOI: 10.1016/j.tsf.2015.12.068,
[Article]
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