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Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere

Kaloumenos, Mareiki ; Hofmann, Klaus ; Spiehl, Dieter ; Hoffmann, Rudolf C. ; Precht, Ruben ; Bonrad, Klaus (2016):
Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere.
In: Thin Solid Films, 600, pp. 59-64. Elsevier ScienceDirect, ISSN 00406090,
DOI: 10.1016/j.tsf.2015.12.068,
[Article]

Item Type:	Article
Erschienen:	2016
Creators:	Kaloumenos, Mareiki ; Hofmann, Klaus ; Spiehl, Dieter ; Hoffmann, Rudolf C. ; Precht, Ruben ; Bonrad, Klaus
Title:	Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere
Language:	English
Journal or Publication Title:	Thin Solid Films
Journal Volume:	600
Publisher:	Elsevier ScienceDirect
Divisions:	11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Surface Science 16 Department of Mechanical Engineering 16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD) 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering 18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering > Integrated Electronic Systems (IES)
Date Deposited:	09 Feb 2016 15:02
DOI:	10.1016/j.tsf.2015.12.068
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