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Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere

Kaloumenos, Mareiki and Hofmann, Klaus and Spiehl, Dieter and Hoffmann, Rudolf C. and Precht, Ruben and Bonrad, Klaus (2016):
Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere.
In: Thin Solid Films, 600, pp. 59-64. Elsevier ScienceDirect, ISSN 00406090,
DOI: 10.1016/j.tsf.2015.12.068,
[Article]

Item Type: Article
Erschienen: 2016
Creators: Kaloumenos, Mareiki and Hofmann, Klaus and Spiehl, Dieter and Hoffmann, Rudolf C. and Precht, Ruben and Bonrad, Klaus
Title: Electrical properties of solution processed multilayer high-k ZrO2 capacitors in inert atmosphere
Language: English
Journal or Publication Title: Thin Solid Films
Journal volume: 600
Publisher: Elsevier ScienceDirect
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD)
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering
18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering > Integrated Electronic Systems
Date Deposited: 09 Feb 2016 15:02
DOI: 10.1016/j.tsf.2015.12.068
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