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Influence of moisture on the electrical properties of solution processed multilayer high-k ZrO2-capacitors

Kaloumenos, Mareiki and Pacak, Philipp and Hoffmann, Rudolf C. and Spiehl, Dieter and Hofmann, Klaus and Bonrad, Klaus (2015):
Influence of moisture on the electrical properties of solution processed multilayer high-k ZrO2-capacitors.
In: RSC Advances, 5 (130), pp. 107608-107615. Royal Society of Chemistry, ISSN 2046-2069,
DOI: 10.1039/C5RA15782J,
[Article]

Item Type: Article
Erschienen: 2015
Creators: Kaloumenos, Mareiki and Pacak, Philipp and Hoffmann, Rudolf C. and Spiehl, Dieter and Hofmann, Klaus and Bonrad, Klaus
Title: Influence of moisture on the electrical properties of solution processed multilayer high-k ZrO2-capacitors
Language: English
Journal or Publication Title: RSC Advances
Journal volume: 5
Number: 130
Publisher: Royal Society of Chemistry
Divisions: 16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Institute of Printing Science and Technology (IDD)
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering
18 Department of Electrical Engineering and Information Technology > Institute of Computer Engineering > Integrated Electronic Systems
Date Deposited: 27 Jan 2016 15:02
DOI: 10.1039/C5RA15782J
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