Hegemann, Dirk (1999)
Plasmagestützte Prozesse zur Abscheidung neuer Hartstoffschichten.
TU Darmstadt
Ph.D. Thesis
| Item Type: | Ph.D. Thesis |
|---|---|
| Erschienen: | 1999 |
| Creators: | Hegemann, Dirk |
| Type of entry: | Bibliographie |
| Title: | Plasmagestützte Prozesse zur Abscheidung neuer Hartstoffschichten |
| Language: | German |
| Referees: | Riedel, Prof. Dr. Ralf ; Hahn, Prof. Dr. Horst ; Oehr, Dr. C. |
| Date: | August 1999 |
| Place of Publication: | Aachen |
| Publisher: | Shaker |
| Series: | Forschungsberichte Neue Materialien aus dem Fachgebiet Disperse Feststoffe, TU Darmstadt |
| Series Volume: | 8 |
| Collation: | IV, 146 S |
| Refereed: | 7 July 1999 |
| Edition: | Aachen: Shaker, 1999. IV, 146 S |
| URL / URN: | https://www.shaker.de/de/content/catalogue/index.asp?lang=de... |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids 11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences) |
| Date Deposited: | 19 Nov 2008 16:03 |
| Last Modified: | 07 Aug 2018 12:35 |
| PPN: | |
| Referees: | Riedel, Prof. Dr. Ralf ; Hahn, Prof. Dr. Horst ; Oehr, Dr. C. |
| Refereed / Verteidigung / mdl. Prüfung: | 7 July 1999 |
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