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Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

Sobel, Nicolas ; Hess, Christian ; Lukas, Manuela ; Spende, Anne ; Stühn, B. ; Toimil-Molares, M. E. ; Trautmann, Christina (2015)
Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition.
In: Beilstein Journal of Nanotechnology, 6
doi: 10.3762/bjnano.6.48
Article, Bibliographie

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Item Type: Article
Erschienen: 2015
Creators: Sobel, Nicolas ; Hess, Christian ; Lukas, Manuela ; Spende, Anne ; Stühn, B. ; Toimil-Molares, M. E. ; Trautmann, Christina
Type of entry: Bibliographie
Title: Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition
Language: English
Date: 2015
Journal or Publication Title: Beilstein Journal of Nanotechnology
Volume of the journal: 6
DOI: 10.3762/bjnano.6.48
Corresponding Links:
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Ion-Beam-Modified Materials
05 Department of Physics
05 Department of Physics > Institute for condensed matter physics (2021 merged in Institute for Condensed Matter Physics)
05 Department of Physics > Institute for condensed matter physics (2021 merged in Institute for Condensed Matter Physics) > Experimental Condensed Matter Physics
07 Department of Chemistry
07 Department of Chemistry > Eduard Zintl-Institut
07 Department of Chemistry > Eduard Zintl-Institut > Physical Chemistry
Date Deposited: 22 Jul 2015 06:46
Last Modified: 25 Apr 2024 07:53
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