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Surface hydrophilization of SU-8 by plasma and wet chemical processes

Walther, Ferdinand ; Drobek, Tanja ; Gigler, Alexander M. ; Hennemeyer, Marc ; Kaiser, Michael ; Herberg, Helmut ; Shimitsu, Tetsuji ; Morfill, Gregor E. ; Stark, Robert W. (2010)
Surface hydrophilization of SU-8 by plasma and wet chemical processes.
In: Surface and Interface Analysis, 42 (12-13)
doi: 10.1002/sia.3515
Article, Bibliographie

URL / URN: https://doi.org/10.1002/sia.3515

Item Type:	Article
Erschienen:	2010
Creators:	Walther, Ferdinand ; Drobek, Tanja ; Gigler, Alexander M. ; Hennemeyer, Marc ; Kaiser, Michael ; Herberg, Helmut ; Shimitsu, Tetsuji ; Morfill, Gregor E. ; Stark, Robert W.
Type of entry:	Bibliographie
Title:	Surface hydrophilization of SU-8 by plasma and wet chemical processes
Language:	English
Date:	December 2010
Journal or Publication Title:	Surface and Interface Analysis
Volume of the journal:	42
Issue Number:	12-13
DOI:	10.1002/sia.3515
URL / URN:	https://doi.org/10.1002/sia.3515
Divisions:	11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Physics of Surfaces DFG-Collaborative Research Centres (incl. Transregio) DFG-Collaborative Research Centres (incl. Transregio) > Collaborative Research Centres Exzellenzinitiative Exzellenzinitiative > Clusters of Excellence Zentrale Einrichtungen Exzellenzinitiative > Clusters of Excellence > Center of Smart Interfaces (CSI)
Date Deposited:	17 Dec 2014 13:02
Last Modified:	26 Jan 2021 06:27
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