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Application and comparison of alternative position sensors in high-accuracy control of an X-Y table

Fischer, Martin (1996)
Application and comparison of alternative position sensors in high-accuracy control of an X-Y table.
Conference or Workshop Item

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Fischer, Martin
Type of entry: Bibliographie
Title: Application and comparison of alternative position sensors in high-accuracy control of an X-Y table
Language: English
Date: 1 January 1996
Place of Publication: Piscataway, NJ
Publisher: IEEE
Series: International Workshop on Advanced Motion Control AMC '96-MIE <4, 1996, Tsu-City, Japan>: Proceedings
Edition: Piscataway, NJ: IEEE, 1996
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:02
Last Modified: 26 Aug 2018 21:21
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